Nanosatellites and MEMS fabrication by laser microprocessing.
| Title: | Nanosatellites and MEMS fabrication by laser microprocessing. |
|---|---|
| Authors: | Helvajian, Henry; Fuqua, Peter D.; Hansen, William W.; Janson, Siegfried W. |
| Source: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p319-326, 8p |
| Database: | Complementary Index |