Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass.
| Title: | Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass. |
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| Authors: | Hansen, William W.; Janson, Siegfried W.; Helvajian, Henry |
| Source: | Proceedings of SPIE; Nov1997, Issue 1, p104-112, 9p |
| Database: | Complementary Index |