FIBSIM – dynamic Monte Carlo simulation of compositional and topography changes caused by focused ion beam milling
| Title: | FIBSIM – dynamic Monte Carlo simulation of compositional and topography changes caused by focused ion beam milling |
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| Authors: | Boxleitner, W.; Hobler, G. * |
| Source: | In Nuclear Inst. and Methods in Physics Research, B 2001 180(1):125-129 |
| Database: | ScienceDirect |