| Title: |
Structural, optical, and electrical properties of TiO2 thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature |
| Authors: |
Jolivet, Aline a, ⁎; Labbé, Christophe a; Frilay, Cédric a; Debieu, Olivier a, b; Marie, Philippe a; Horcholle, Bryan a; Lemarié, Franck a; Portier, Xavier a; Grygiel, Clara a; Duprey, Sylvain a; Jadwisienczak, Wojciech c; Ingram, David d; Upadhyay, Mudit e; David, Adrian e; Fouchet, Arnaud e; Lüders, Ulrike e; Cardin, Julien a, ⁎ |
| Source: |
In Applied Surface Science 15 January 2023 608 |
| Database: |
ScienceDirect |