Multidimensional validation of low-damage BCl[formula omitted]/Ar atomic layer etching for AlGaN/GaN HEMTs
| Title: | Multidimensional validation of low-damage BCl[formula omitted]/Ar atomic layer etching for AlGaN/GaN HEMTs |
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| Authors: | Gao, Boxuan; Zhu, Jiejie ⁎; Li, Mengdi; Qin, Lingjie; Qian, Yuchen; Huang, Simei; Li, Huilin; Liao, Wanshuo; Ma, Xiaohua |
| Source: | In Materials Science in Semiconductor Processing 1 November 2025 198 |
| Database: | ScienceDirect |