| Title: |
XPS study of the chemical surface engineering on ultra-thin InAlN layers:Evaluation of thermal stability to oxygen exposure |
| Authors: |
Bourlier, Yoan; Bouttemy, Muriel; Patard, Olivier; Gamara, Piero; Piotrowicz, Stephane; Vigneron, Jackie; Aubry, Raphael; Delage, Sylvain; Etcheberry, Arnaud. |
| Contributors: |
Institut Lavoisier de Versailles (ILV); Université de Versailles Saint-Quentin-en-Yvelines (UVSQ)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS); Microelectronic GaN, III-V Lab, Campus Polytechnique, 1, avenue Augustin Fresnel, 91767 Palaiseau Cédex; Thales Research & Technology, Campus Polytechnique, 1, avenue Augustin Fresnel, 91767 Palaiseau Cédex |
| Source: |
ECS meeting ; https://hal.science/hal-04403480 ; ECS meeting, May 2018, Seattle, United States |
| Publisher Information: |
CCSD |
| Publication Year: |
2018 |
| Collection: |
Université de Versailles Saint-Quentin-en-Yvelines: HAL-UVSQ |
| Subject Terms: |
[CHIM]Chemical Sciences |
| Subject Geographic: |
Seattle; United States |
| Description: |
International audience |
| Document Type: |
conference object |
| Language: |
English |
| Availability: |
https://hal.science/hal-04403480 |
| Accession Number: |
edsbas.13292D3 |
| Database: |
BASE |