| Title: |
Polarity modulation in compositionally tunable Bi2O2Se thin films |
| Authors: |
Yong-Jyun Wang; Jian-Wei Zhang; Jianchu Chen; Haonan Wang; Shiuan Wu; Chang-Yu Lo; Jhe-Ting Hong; Cheng-Yang Syu; Li-Syuan Hao; I-Sung Chen; Yuan-Chih Chang; Zhenzhong Yang; Rong Huang; Chun-Liang Lin; Po-Wen Chiu; Yu-Lun Chueh; Yi-Cheng Chen; Chao-Hui Yeh; Ying-Hao Chu |
| Source: |
Nature Communications, Vol 16, Iss 1, Pp 1-9 (2025) |
| Publisher Information: |
Nature Portfolio |
| Publication Year: |
2025 |
| Collection: |
Directory of Open Access Journals: DOAJ Articles |
| Subject Terms: |
Science |
| Description: |
Two-dimensional (2D) materials have emerged as one of most promising candidates to meet the demands of beyond-silicon technology. Among 2D semiconductors, Bi2O2Se (BOSe) stands out as a channel material for advanced electronic applications, due to its high electron mobility and the formation of a native high-k dielectric layer. However, the fabrication of p-type 2D BOSe transistors remains challenging. Here, we report an area-selective doping method at low temperatures (~600 K, compatible with back-end-of-line processes) of pulsed laser deposited BOSe thin films, enabling the modulation of their carrier polarity via the introduction of Zn2+ substitutional dopants. Taking advantage of this doping strategy, we demonstrate the fabrication of a 2D vertical p-n homojunction with an on/off ratio in photoresponse of ~106 and planar transistors based on p-doped BOSe homojunctions. Our results help promoting the application of this material system towards the development of the next-generation electronics. |
| Document Type: |
article in journal/newspaper |
| Language: |
English |
| Relation: |
https://doi.org/10.1038/s41467-025-58198-3; https://doaj.org/toc/2041-1723; https://doaj.org/article/6325c4fda99b4ca980fccbc4b4ad86a7 |
| DOI: |
10.1038/s41467-025-58198-3 |
| Availability: |
https://doi.org/10.1038/s41467-025-58198-3; https://doaj.org/article/6325c4fda99b4ca980fccbc4b4ad86a7 |
| Accession Number: |
edsbas.1ACBF657 |
| Database: |
BASE |