| Title: |
Microheater integration in gate dielectric functionalized a-IGZO thin film transistors for methanol sensing |
| Authors: |
Calderon González, Maider; Tietze, Max Lutz; Mondal, Suparna; Georgitzikis, Epimitheas; Cheyns, David; Ameloot, Rob; Genoe, Jan |
| Source: |
ISBN:979-8-3315-3169-0 ; ISSN:1071-9032 ; 2025 IEEE 37th International Conference on Microelectronic Test Structures (ICMTS) ; 2025 IEEE 37th International Conference on Microelectronic Test Structures (ICMTS), San Antonio, Texas, 24-27 March 2025. |
| Publisher Information: |
IEEE |
| Publication Year: |
2025 |
| Subject Terms: |
Baseline drift; methanol sensor; Metal-organic Framework; thin film transistor; microheater; temperature sensor |
| Description: |
sponsorship: This work was supported by the Research Foundation Flanders (FWO Vlaanderen) for funding in the research project under Grant G087422N. (Research Foundation Flanders (FWO Vlaanderen)|G087422N) ; status: Published online |
| Document Type: |
conference object |
| Language: |
English |
| ISBN: |
979-83-315-3169-0 |
| Relation: |
https://lirias.kuleuven.be/handle/20.500.12942/768601; https://doi.org/10.1109/ICMTS63811.2025.11068903 |
| DOI: |
10.1109/ICMTS63811.2025.11068903 |
| Availability: |
https://lirias.kuleuven.be/handle/20.500.12942/768601; https://hdl.handle.net/20.500.12942/768601; https://doi.org/10.1109/ICMTS63811.2025.11068903 |
| Rights: |
info:eu-repo/semantics/restrictedAccess ; intranet |
| Accession Number: |
edsbas.261F7B4F |
| Database: |
BASE |