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Infrared photoresponse of GeSiSn p–i–n photodiodes based on quantum dots, quantum wells, pseudomorphic and relaxed layers

Title: Infrared photoresponse of GeSiSn p–i–n photodiodes based on quantum dots, quantum wells, pseudomorphic and relaxed layers
Authors: Timofeev, Vyacheslav A.; Skvortsov, Ilya V.; Mashanov, Vladimir I.; Bloshkin, Aleksei A.; Loshkarev, Ivan D.; Kirienko, Victor V.; Zalyalov, T. M.; Lozovoy, Kirill A.
Source: Nanotechnology. 2025. Vol. 36, № 13. P. 135201 (1-10)
Publication Year: 2025
Collection: Tomsk State University Research Library / Электронная библиотека (репозиторий) Томского государственного университета (ТГУ)
Subject Terms: германий; кремний; олово; фотодиоды; квантовые точки; квантовые ямы; эпитаксия; темновые токи; фототок
Description: Structural and photoelectric properties of p–i–n photodiodes based on GeSiSn/Si multiple quantum dots (QDs) both on Si and silicon-on-insulator substrates were investigated. Elastic strained state of grown films was demonstrated by x-ray diffractometry. Annealing of p–i–n structures before the mesa fabrication can improve the ideality factor of current–voltage characteristics. The lowest dark current density of p–i–n photodiodes based on QDs at the reverse bias of 1 V reaches the value of 0.8 mA cm−2. The cutoff wavelength shifts to the long-wavelength region with the Sn content increase. Maximum cutoff wavelength value is found to be 2.6 μm. Moreover, multilayer periodic structures with GeSiSn/Ge quantum wells and GeSiSn relaxed layers on Ge substrates were obtained. Reciprocal space maps were used to study the strained state of GeSiSn layers. The optimal growth parameters were determined to obtain slightly relaxed GeSiSn layers. Designed p–i–n photodiodes based on these structures demonstrated the minimal dark current density of 0.7 mA cm−2 and the cutoff wavelength of about 2 μm.
Document Type: article in journal/newspaper
File Description: application/pdf
Language: English
Relation: Nanotechnology; koha:001268416; https://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001268416
DOI: 10.1088/1361-6528/ada9a6
Availability: https://doi.org/10.1088/1361-6528/ada9a6; https://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001268416
Accession Number: edsbas.26C15772
Database: BASE