| Title: |
Helium Ion Beam Microscopy for Copper Grain Identification in BEOL Structures |
| Authors: |
van den Boom, Ruud J. J.; Parvaneh, Hamed; Voci, Dave; Huynh, Chuong; Stern, Lewis; Dunn, Kathleen A.; Lifshin, Eric; Secula, Erik M.; Seiler, David G.; Khosla, Rajinder P.; Herr, Dan; Michael Garner, C.; McDonald, Robert; Diebold, Alain C. |
| Source: |
AIP Conference Proceedings ; page 309-313 |
| Publisher Information: |
AIP |
| Publication Year: |
2009 |
| Document Type: |
conference object |
| Language: |
unknown |
| DOI: |
10.1063/1.3251241 |
| Availability: |
https://doi.org/10.1063/1.3251241 |
| Accession Number: |
edsbas.27319F03 |
| Database: |
BASE |