Phase-Sensitive Optical Coherence Microscopy of Integrated Nanophotonics Devices
| Title: | Phase-Sensitive Optical Coherence Microscopy of Integrated Nanophotonics Devices |
|---|---|
| Authors: | Sirotin, Maxim A.; Lyubin, Evgeny V.; Safronov, Kirill R.; Akhremenkov, Daniil V.; Bessonov, Vladimir O.; Soboleva, Irina V.; Fedyanin, Andrey A. |
| Source: | Journal of Physics: Conference Series ; volume 2015, issue 1, page 012143 ; ISSN 1742-6588 1742-6596 |
| Publisher Information: | IOP Publishing |
| Publication Year: | 2021 |
| Description: | We report on the development of a new approach for studying the internal structure of polymer integrated nanophotonics devices using phase-sensitive optical coherence microscopy. Visualization and flaw detection of devices and their internal structure was carried out using the example of coupling gratings and prisms for a miniature Otto configuration with a characteristic gap height of 50-300 nm. |
| Document Type: | article in journal/newspaper |
| Language: | unknown |
| DOI: | 10.1088/1742-6596/2015/1/012143 |
| DOI: | 10.1088/1742-6596/2015/1/012143/pdf |
| Availability: | https://doi.org/10.1088/1742-6596/2015/1/012143; https://iopscience.iop.org/article/10.1088/1742-6596/2015/1/012143; https://iopscience.iop.org/article/10.1088/1742-6596/2015/1/012143/pdf |
| Rights: | http://creativecommons.org/licenses/by/3.0/ ; https://iopscience.iop.org/info/page/text-and-data-mining |
| Accession Number: | edsbas.29CB68B0 |
| Database: | BASE |