| Title: |
Electrical and mechanical characterisation of Si nanowires by scanning probe microscopy |
| Authors: |
Kogelschatz, M.; Potié, A.; Gordon, M.; Abed, H.; Dhalluin, F.; Salem, B.; Baron, T. |
| Contributors: |
Laboratoire des technologies de la microélectronique (LTM); Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS) |
| Source: |
Connecting to the nanoworld, 22. Entretiens Jacques Cartier ; https://hal.science/hal-00461120 ; Connecting to the nanoworld, 22. Entretiens Jacques Cartier, 2009, Ecully, France |
| Publisher Information: |
CCSD |
| Publication Year: |
2009 |
| Collection: |
Université Grenoble Alpes: HAL |
| Subject Geographic: |
Ecully; France |
| Document Type: |
conference object |
| Language: |
English |
| Availability: |
https://hal.science/hal-00461120 |
| Accession Number: |
edsbas.2C541DC4 |
| Database: |
BASE |