| Title: |
Flat metallic surface gratings with sub-10 nm gaps controlled by atomic-layer deposition |
| Authors: |
Chen, Borui; Ji, Dengxin; Cheney, Alec; Zhang, Nan; Song, Haomin; Zeng, Xie; Thomay, Tim; Gan, Qiaoqiang; Cartwright, Alexander |
| Contributors: |
National Science Foundation |
| Source: |
Nanotechnology ; volume 27, issue 37, page 374003 ; ISSN 0957-4484 1361-6528 |
| Publisher Information: |
IOP Publishing |
| Publication Year: |
2016 |
| Document Type: |
article in journal/newspaper |
| Language: |
unknown |
| DOI: |
10.1088/0957-4484/27/37/374003 |
| Availability: |
https://doi.org/10.1088/0957-4484/27/37/374003; http://stacks.iop.org/0957-4484/27/i=37/a=374003/pdf; http://stacks.iop.org/0957-4484/27/i=37/a=374003?key=crossref.3b6d46bfcd8f11f59c024daf169f2163; http://stacks.iop.org/0957-4484/27/i=37/a=374003/ampdf |
| Rights: |
http://iopscience.iop.org/info/page/text-and-data-mining ; http://iopscience.iop.org/page/copyright ; http://creativecommons.org/licenses/by-nc-nd/3.0 |
| Accession Number: |
edsbas.2EE816E2 |
| Database: |
BASE |