| Title: |
Fabrication of SiC nanopillars by inductively coupled SF6/O2 plasma |
| Authors: |
Choi, J.H.; Latu-Romain, L.; Dhalluin, F.; Chevolleau, T.; Salem, B.; Baron, T.; Bano, Edwige |
| Contributors: |
Laboratoire des technologies de la microélectronique (LTM); Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS) |
| Source: |
HeteroSiC ; https://hal.science/hal-00650057 ; HeteroSiC, Jun 2011, Tours, France |
| Publisher Information: |
CCSD |
| Publication Year: |
2011 |
| Collection: |
Université Grenoble Alpes: HAL |
| Subject Geographic: |
Tours; France |
| Description: |
International audience |
| Document Type: |
conference object |
| Language: |
English |
| Availability: |
https://hal.science/hal-00650057 |
| Accession Number: |
edsbas.313DD40D |
| Database: |
BASE |