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Electrooptic and converse-piezoelectric properties of epitaxial GaN/Si structures for optoelectronic applications

Title: Electrooptic and converse-piezoelectric properties of epitaxial GaN/Si structures for optoelectronic applications
Authors: Cuniot-Ponsard, Mireille; Saraswati, Irma; Ko, S.-M.; Halbwax, Mathieu; Cho, Y.-H.; Poespawati, N.-R.; Dogheche, El Hadj
Contributors: Laboratoire Charles Fabry / Manolia; Laboratoire Charles Fabry (LCF); Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS); Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN); Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF); Universitas Indonesia (UI); Department of Physics and KI for the Nano-Century; Korea Advanced Institute of Science and Technology (KAIST); Optoélectronique - IEMN (OPTO - IEMN); Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF); Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE)
Source: European Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium K - Challenges for group III nitride semiconductors for solid state lighting and beyond ; https://hal.science/hal-00961405 ; European Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium K - Challenges for group III nitride semiconductors for solid state lighting and beyond, May 2014, Lille, France
Publisher Information: CCSD
Publication Year: 2014
Collection: Université Polytechnique Hauts-de-France: HAL
Subject Terms: [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Subject Geographic: Lille; France
Description: International audience ; In order to take advantage in all-optic optoelectronic devices, we have investigated the optical and piezoelectric properties of GaN films deposited on (111) silicon. Films are epitaxially grown by MOCVD, thanks to a buffer made of (Al, Ga) N intermediate layers [1]. Structural properties of GaN are analyzed using TEM and the influence of threading dislocations density is discussed. Optical properties are investigated using a prism coupling [2]. Electrooptic measurements are performed using an original technique [3]. A semi-transparent gold electrode is deposited on top of GaN layer and an alternating voltage is applied between top and bottom electrodes. The electro-optic, converse piezoelectric, and electro-absorptive coefficients are simultaneously determined from the measurement of the electric field induced variation ΔR(θ) in the reflectivity of the Au/GaN/buffer/Si stack versus incident angle. The method also enables to determine the GaN layer polarity. The results obtained for a Ga-face [0001] GaN layer when using a modulation frequency of 230 Hz are for the electro-optic coefficients r13 = +1 pm/V, r33 = +1.60 pm/V at 633 nm, and for the transverse piezoelectric coefficient d33 = +4.59 pm/V. The value measured for the electro-absorptive variation is Δko/ΔE = +0.77 pm/V. The electro-optic coefficients for GaN /Si and the electro-absorptive coefficient are measured for the first time. The converse piezoelectric value agrees with values previously reported.
Document Type: conference object
Language: English
Availability: https://hal.science/hal-00961405; https://hal.science/hal-00961405v1/document; https://hal.science/hal-00961405v1/file/00964286.pdf
Rights: info:eu-repo/semantics/OpenAccess
Accession Number: edsbas.34C2BF1
Database: BASE