| Title: |
Enhanced multiple pulses incubation of high-repetition-rate femtosecond laser via seed guidance |
| Authors: |
Yin, Jingbo; Hong, Minghui |
| Contributors: |
Tianfu Xinglong Lake Laboratory's laser micro-nano manufacturing high-end talent introduction project |
| Source: |
Journal of Applied Physics ; volume 139, issue 8 ; ISSN 0021-8979 1089-7550 |
| Publisher Information: |
AIP Publishing |
| Publication Year: |
2026 |
| Description: |
Multiple pulses incubation based on defects accumulation in laser processing can reduce material ablation threshold and improve machining accuracy, but the randomness of the laser-induced defects leads to unstable incubation. Here, the enhanced multiple pulses incubation strategy of a high-repetition-rate femtosecond laser via seed guidance is proposed to improve machining accuracy. The stable multiple pulses incubation is attributed to a pre-designed seed at a laser processing starting point and a high-repetition-rate femtosecond laser being used. A defect called seed is first prepared on the substrate at a high laser fluence, which significantly increases the absorption of subsequent laser pulses energy. Taking the seed as the starting point of laser processing, subsequent pulses can realize laser ablation at a much lower laser fluence and create new seeds. With the multiple pulses irradiation of the high-repetition-rate femtosecond laser, the stable incubation is finally realized by forming cascade seeds along the scanning path. The material ablation threshold is significantly reduced via the enhanced incubation effect. At a lower laser fluence, the fabricated size is reduced from ∼2.5 to ∼0.7 μm on a silicon substrate. Using this strategy, high-performance reflection grating and a superhydrophobic functional surface are fabricated on silicon substrates. Meanwhile, this strategy can also be extended to transparent material processing. |
| Document Type: |
article in journal/newspaper |
| Language: |
English |
| DOI: |
10.1063/5.0315173 |
| DOI: |
10.1063/5.0315173/20919156/083108_1_5.0315173.pdf |
| Availability: |
https://doi.org/10.1063/5.0315173; https://pubs.aip.org/aip/jap/article-pdf/doi/10.1063/5.0315173/20919156/083108_1_5.0315173.pdf |
| Rights: |
https://creativecommons.org/licenses/by/4.0/ |
| Accession Number: |
edsbas.3DEEBA16 |
| Database: |
BASE |