| Title: |
Laser produced plasma light source development for HVM |
| Authors: |
Fomenkov, Igor V.; Brandt, David C.; Farrar, Nigel R.; La Fontaine, Bruno; Myers, David W.; Brown, Daniel J.; Ershov, Alex I.; Böwering, Norbert R.; Riggs, Daniel J.; Rafac, Robert J.; De Dea, Silvia; Purvis, Michael; Peeters, Rudy; Meiling, Hans; Harned, Noreen; Smith, Daniel; Kazinczi, Robert; Pirati, Alberto |
| Contributors: |
Wood, Obert R.; Panning, Eric M. |
| Source: |
SPIE Proceedings ; Extreme Ultraviolet (EUV) Lithography V ; volume 9048, page 904835 ; ISSN 0277-786X |
| Publisher Information: |
SPIE |
| Publication Year: |
2014 |
| Document Type: |
conference object |
| Language: |
unknown |
| DOI: |
10.1117/12.2048195 |
| Availability: |
https://doi.org/10.1117/12.2048195 |
| Accession Number: |
edsbas.449CF88D |
| Database: |
BASE |