| Title: |
200 mm Wafer Level Characterization at 2 K of Si/SiGe Field-Effect Transistors |
| Authors: |
Komericki, Nikola David; Muster, Pascal; Reichmann, Felix; Huckemann, Till; Kaufmann, Daniel; Yamamoto, Yuji; Lisker, Marco; Langheinrich, Wolfram; Schreiber, Lars R; Bluhm, Hendrik; Quay, Rüdiger |
| Source: |
ECS transactions. - 114, 2 (2024) , 133-144, ISSN: 1938-6737 |
| Publication Year: |
2024 |
| Collection: |
University of Freiburg: FreiDok |
| Document Type: |
article in journal/newspaper |
| Language: |
English |
| Relation: |
https://freidok.uni-freiburg.de/data/260330 |
| DOI: |
10.1149/11402.0133ecst |
| Availability: |
https://freidok.uni-freiburg.de/data/260330; https://doi.org/10.1149/11402.0133ecst |
| Accession Number: |
edsbas.49F44EDD |
| Database: |
BASE |