Functional nano patterns realized by aligned nano imprint lithography
| Title: | Functional nano patterns realized by aligned nano imprint lithography |
|---|---|
| Authors: | Baum, Mario; Besser, J.; Wiemer, Maik; Thanner, C.; Kreindl, G.; Wimplinger, M.; Geßner, Thomas |
| Publication Year: | 2014 |
| Collection: | Publikationsdatenbank der Fraunhofer-Gesellschaft |
| Description: | S.443-446 |
| Document Type: | conference object |
| Language: | English |
| Relation: | Smart Systems Integration Conference (SSI) 2014; International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2014; Smart Systems Integration 2014; https://publica.fraunhofer.de/handle/publica/384145 |
| Availability: | https://publica.fraunhofer.de/handle/publica/384145 |
| Accession Number: | edsbas.4AFEA5F0 |
| Database: | BASE |