| Title: |
Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect |
| Authors: |
Orellana, Sebastian; Arrazat, Brice; Fornara, Pascal; Rivero, Christian; Blayac, Sylvain; Montmitonnet, Pierre; Inal, Karim |
| Contributors: |
Centre de Mise en Forme des Matériaux (CEMEF); Mines Paris - PSL (École nationale supérieure des mines de Paris); Université Paris Sciences et Lettres (PSL)-Université Paris Sciences et Lettres (PSL)-Centre National de la Recherche Scientifique (CNRS); STMicroelectronics Rousset (ST-ROUSSET); Département Packaging et Supports Souples (PS2-ENSMSE); École des Mines de Saint-Étienne (Mines Saint-Étienne MSE); Institut Mines-Télécom Paris (IMT)-Institut Mines-Télécom Paris (IMT)-CMP-GC |
| Source: |
ISSN: 0026-2714. |
| Publisher Information: |
CCSD; Elsevier |
| Publication Year: |
2015 |
| Collection: |
MINES ParisTech: Archive ouverte / Open Archive (HAL) |
| Subject Terms: |
Thermo-mechanical; Finite element modelling; Embedded sensor; Back End Of Line; Residual stress; [SPI.MAT]Engineering Sciences [physics]/Materials |
| Description: |
International audience ; A new concept of a thermo-mechanical lateral switch activation is proposed. Embedded in standard aluminium BEOL (Back End Of Line), it is fully integrated in CMOS technology. The simplicity of this low cost one-mask fabrication allows the straightforward scalability of design. Most functional problems have been solved through process, simulation and design: stiction, bending, displacement, and robustness. The present study of a thermo-mechanical MEMS switch focuses on three points. Firstly, the design is modified to increase the apparent area contact and the force applied. Secondly, in order to ensure the reversibility of the movement, a running-in step before operation is implemented. Finally, a new design is proposed, simulated and manufactured to avoid the undesirable activations by spurious homogeneous heating. |
| Document Type: |
article in journal/newspaper |
| Language: |
English |
| DOI: |
10.1016/j.microrel.2015.06.032 |
| Availability: |
https://minesparis-psl.hal.science/hal-01180626; https://doi.org/10.1016/j.microrel.2015.06.032 |
| Accession Number: |
edsbas.5F77B34B |
| Database: |
BASE |