| Title: |
78‐2: A flat‐panel‐display compatible ultrasound platform |
| Authors: |
Georgitzikis, Epimitheas; Gijsenbergh, Pieter; Segers, Jeremy; Wysocka, Dominika; Viaene, John; Kuna, Tibor; Ukropec, Robert; Roose, FloriansDe; Appeltans, Raf; Pandit, Milind; Kinoshita, Tomoatsu; Stoffels, Steve; Cheyns, David |
| Source: |
SID Symposium Digest of Technical Papers ; volume 54, issue 1, page 1101-1104 ; ISSN 0097-966X 2168-0159 |
| Publisher Information: |
Wiley |
| Publication Year: |
2023 |
| Collection: |
Wiley Online Library (Open Access Articles via Crossref) |
| Description: |
We present a thin‐film piezoelectric micromachined ultrasonic transducer (PMUT) technology compatible with flat‐panel manufacturing methods. Using the developed flow which is based on a low temperature AlScN piezoelectric layer, we fabricate large area 48x48 element PMUT arrays on glass. Beam steering and ultrasound medical imaging are demonstrated. The developed transducer technology can be combined with a TFT backplane and has the potential of direct integration on top of display size glass sheets, expanding the boundaries of ultrasound application domains. |
| Document Type: |
article in journal/newspaper |
| Language: |
English |
| DOI: |
10.1002/sdtp.16764 |
| Availability: |
https://doi.org/10.1002/sdtp.16764 |
| Rights: |
http://onlinelibrary.wiley.com/termsAndConditions#vor |
| Accession Number: |
edsbas.6A1BBA25 |
| Database: |
BASE |