Poster - Fabrication of a MEMS Comb Drive Actuator
| Title: | Poster - Fabrication of a MEMS Comb Drive Actuator |
|---|---|
| Authors: | Banees, Adam |
| Source: | Journal of the Microelectronic Engineering Conference |
| Publisher Information: | RIT Digital Institutional Repository |
| Publication Year: | 2016 |
| Collection: | Rochester Institute of Technology: RIT Scholar Works |
| Subject Terms: | Engineering |
| Document Type: | text |
| File Description: | application/pdf |
| Language: | unknown |
| Relation: | https://repository.rit.edu/ritamec/vol22/iss1/3; https://repository.rit.edu/context/ritamec/article/1511/viewcontent/Banees_Poster2016.pdf |
| Availability: | https://repository.rit.edu/ritamec/vol22/iss1/3; https://repository.rit.edu/context/ritamec/article/1511/viewcontent/Banees_Poster2016.pdf |
| Accession Number: | edsbas.76B05E1 |
| Database: | BASE |