Extended defect generation by Xenon implantation in silicon
| Title: | Extended defect generation by Xenon implantation in silicon |
|---|---|
| Authors: | Mica, I.; Polignano, M. L.; Mauri, A. G.; Codegoni, D.; Grasso, S.; Pozzi, C.; Soncini, V.; Targa, P.; Vad, K. |
| Source: | AIP Conference Proceedings ; page 64-68 ; ISSN 0094-243X |
| Publisher Information: | AIP Publishing LLC |
| Publication Year: | 2014 |
| Document Type: | conference object |
| Language: | unknown |
| DOI: | 10.1063/1.4865606 |
| Availability: | https://doi.org/10.1063/1.4865606 |
| Accession Number: | edsbas.76CE9717 |
| Database: | BASE |