| Title: |
Germanium coated silicon nanowires as human respiratory sensing device |
| Authors: |
Aghabalaei Fakhri, Elham; Sultan, Muhammad Taha; Manolescu, Andrei; Ingvarsson, Snorri; Svavarsson, Halldor |
| Contributors: |
Department of Engineering (RU); Verkfræðideild (HR); School of Technology (RU); Tæknisvið (HR); Science Institute (UI); Raunvísindastofnun (HÍ); Reykjavik University; Háskólinn í Reykjavík; University of Iceland; Háskóli Íslands |
| Publisher Information: |
IEEE |
| Publication Year: |
2022 |
| Collection: |
Opin vísindi (Iceland) |
| Subject Terms: |
Silicon nanowire arrays; MACE; Air flow sensor; Humidity sensors; Scanning electron microscopy; X-ray scattering; X-ray diffraction; Germanium; Silicon; Etching; Nanótækni; Kísill; Smásjár; Rafeindafræði; Röntgentækni; Geislafræði; German (frumefni) |
| Description: |
Post-print (lokagerð höfundar) ; We report on germanium coated silicon nanowires structures synthesized with metal assisted chemical etching and qualify their functionality as human respiratory sensor. The sensors were made from p-type single-crystalline (100) silicon wafers using a silver catalyzed top-down etching, afterwards coated by 50 nm germanium thin layer using a magnetron sputtering. The germanium post-treatment was performed by rapid thermal annealing at 450 and 700◦C. The sensors were characterized by X-ray diffraction diffractogram and scanning electron microscopy. It is demonstrated that the sensors are highly sensitive as human breath detectors, with rapid response and frequency detectability. They are also shown to be a good candidate for human respiratory disease diagnoses. ; This work was supported by Reykjavik University Ph.D. fund no. 220006 and the Icelandic Research Fund Grant no. 218029-051. We are grateful to Rodica Plugaru and Neculai Plugaru for discussions. ; Peer reviewe |
| Document Type: |
conference object |
| Language: |
English |
| Relation: |
http://xplorestaging.ieee.org/ielx7/9933917/9933992/09934678.pdf?arnumber=9934678; https://hdl.handle.net/20.500.11815/4555; 2022 International Semiconductor Conference (CAS) |
| DOI: |
10.1109/CAS56377.2022.9934678 |
| Availability: |
https://hdl.handle.net/20.500.11815/4555; https://doi.org/10.1109/CAS56377.2022.9934678 |
| Rights: |
info:eu-repo/semantics/openAccess |
| Accession Number: |
edsbas.7817338E |
| Database: |
BASE |