Deactivation of ultra shallow B and BF2 profiles after non-melt laser annealing
| Title: | Deactivation of ultra shallow B and BF2 profiles after non-melt laser annealing |
|---|---|
| Authors: | Sharp JA; Cowern NEB; Webb RP; Giubertoni D; Gennaro S; Bersani M; Foad MA; Kirkby KJ |
| Source: | Materials Research Society Symposium Proceedings: Doping Engineering for Device Fabrication, 18-19 April 2006 |
| Publisher Information: | Materials Research Society |
| Publication Year: | 2006 |
| Collection: | Newcastle University Library ePrints Service |
| Document Type: | conference object |
| Language: | unknown |
| Relation: | https://eprints.ncl.ac.uk/6825 |
| Availability: | https://eprints.ncl.ac.uk/6825 |
| Accession Number: | edsbas.799CF8CE |
| Database: | BASE |