| Title: |
Comparability of TXRF Systems at Different Laboratories |
| Authors: |
Nutsch, A.; Beckhoff, B.; Altmann, R.; Polignano, M.; Cazzini, E.; Codegoni, D.; Borionetti, G.; Kolbe, M.; Mueller, M; Mantler, C.; Streli, C. |
| Publication Year: |
2009 |
| Collection: |
Publikationsdatenbank der Fraunhofer-Gesellschaft |
| Time: |
670; 620; 530 |
| Description: |
S.325-335 |
| Document Type: |
conference object |
| Language: |
English |
| Relation: |
Symposium "Analytical Techniques for Semiconductor Materials and Process Characterization" (ALTECH) 2009; Electrochemical Society (Meeting) 2009; Analytical techniques for semiconductor materials and process characterization 6. ALTECH 2009; https://publica.fraunhofer.de/handle/publica/365038 |
| DOI: |
10.1149/1.3204423 |
| Availability: |
https://publica.fraunhofer.de/handle/publica/365038; https://doi.org/10.1149/1.3204423 |
| Accession Number: |
edsbas.7D40FCB9 |
| Database: |
BASE |