| Title: |
Abrasive-free chemical-mechanical planarization (CMP) of gold for thin film nano-patterning |
| Authors: |
Gherman, Raphael; Beaudin, Guillaume; Stricher, Romain; Bryche, Jean-François; Levesque, Pierre; Fillion-Gourdeau, François; Maclean, Steve, G; Drouin, Dominique; Charette, Paul, G; Ecoffey, Serge |
| Contributors: |
Institut Interdisciplinaire d'Innovation Technologique Sherbrooke (3IT); Université de Sherbrooke = University of Sherbrooke Sherbrooke (UdeS); Laboratoire Nanotechnologies et Nanosystèmes Sherbrooke (LN2); Université de Sherbrooke = University of Sherbrooke Sherbrooke (UdeS)-École Centrale de Lyon (ECL); Université de Lyon-Université de Lyon-École Supérieure de Chimie Physique Électronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon); Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA); Institute for Quantum Computing Waterloo (IQC); University of Waterloo Waterloo; Infinite Potential Labs; Énergie Matériaux Télécommunications - INRS (EMT-INRS); Institut National de la Recherche Scientifique Québec (INRS)-Université du Québec à Montréal = University of Québec in Montréal (UQAM) |
| Source: |
ISSN: 2040-3364. |
| Publisher Information: |
CCSD; Royal Society of Chemistry |
| Publication Year: |
2024 |
| Collection: |
Université de Lyon: HAL |
| Subject Terms: |
[SPI]Engineering Sciences [physics] |
| Description: |
International audience ; This 5 × 3 mm 2 photograph shows the vibrant colors reflected by a nanostructured gold surface made by CMP. Each 20 × 20 μm 2 pixel is a mosaic of gold nanocubes with different dimensions, creating this colorful image of the gold CMP damascene technique. |
| Document Type: |
article in journal/newspaper |
| Language: |
English |
| DOI: |
10.1039/d4nr02610a |
| Availability: |
https://iogs.hal.science/hal-04786939; https://iogs.hal.science/hal-04786939v1/document; https://iogs.hal.science/hal-04786939v1/file/d4nr02610a.pdf; https://doi.org/10.1039/d4nr02610a |
| Rights: |
https://creativecommons.org/licenses/by-nc-nd/4.0/ ; info:eu-repo/semantics/OpenAccess |
| Accession Number: |
edsbas.82DFC3DB |
| Database: |
BASE |