| Title: |
Industrial applications demanding low and high resolution features realized by soft UV-NIL and hot embossing |
| Authors: |
Miller, R.; Glinsner, T.; Kreindl, G.; Lindner, P.; Wimplinger, M. |
| Contributors: |
Schellenberg, Frank M.; La Fontaine, Bruno M. |
| Source: |
SPIE Proceedings ; Alternative Lithographic Technologies ; volume 7271, page 72712J ; ISSN 0277-786X |
| Publisher Information: |
SPIE |
| Publication Year: |
2009 |
| Document Type: |
conference object |
| Language: |
unknown |
| DOI: |
10.1117/12.814102 |
| Availability: |
https://doi.org/10.1117/12.814102 |
| Accession Number: |
edsbas.8A5C57EF |
| Database: |
BASE |