| Title: |
Characterization of Organic Contamination in Semiconductor Manufacturing Processes |
| Authors: |
Nutsch, A.; Beckhoff, B.; Bedana, G.; Borionetti, G.; Codegoni, D.; Grasso, S.; Guerinoni, G.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.-L.; De Simone, D.; Frey, L.; Secula, Erik M.; Seiler, David G.; Khosla, Rajinder P.; Herr, Dan; Michael Garner, C.; McDonald, Robert; Diebold, Alain C. |
| Source: |
AIP Conference Proceedings ; page 23-28 |
| Publisher Information: |
AIP |
| Publication Year: |
2009 |
| Document Type: |
conference object |
| Language: |
unknown |
| DOI: |
10.1063/1.3251227 |
| Availability: |
https://doi.org/10.1063/1.3251227 |
| Accession Number: |
edsbas.98089DB0 |
| Database: |
BASE |