| Title: |
Scanning microwave microscopy for investigations of mechanical vibrations and mode coupling |
| Authors: |
Zhou, Xin; Theron, D.; Xu, H.; Boyaval, Christophe; Eliet, Sophie; Tilmant, Pascal |
| Contributors: |
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN); Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA); Université catholique de Lille (UCL)-Université catholique de Lille (UCL); Nano and Microsystems - IEMN (NAM6 - IEMN); Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA); Centrale de Micro Nano Fabrication - IEMN (CMNF - IEMN); Plateforme de Caractérisation Multi-Physiques - IEMN - RFNET (PCMP - IEMN - RFNET); Plateforme de Caractérisation Multi-Physiques - IEMN (PCMP - IEMN); Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN); Renatech Network; CMNF; PCMP CHOP; RF-NET |
| Source: |
Frontiers of Nanomechanical Systems ; https://hal.science/hal-04234474 ; Frontiers of Nanomechanical Systems, Jun 2023, Delft, Netherlands |
| Publisher Information: |
CCSD |
| Publication Year: |
2023 |
| Collection: |
Université Polytechnique Hauts-de-France: HAL |
| Subject Terms: |
Scanning microwave microscopy; membrane; nanomechanical vibration; [SPI]Engineering Sciences [physics] |
| Subject Geographic: |
Delft; Netherlands |
| Description: |
International audience ; In recent years, scanning probe microscopy has attracted interests for dielectric property characterization at the nanoscale of a wide range of materials due to its capability to measure aF scale capacitances or variations [1]. For this reason, it can be exploited to manipulate nanomechanical vibrations of NEMS/MEMS [2]. In this work, we present a novel platform of scanning microwave microscopy for manipulating and detecting mechanical vibrations of nanoelectromechanical resonators. In this platform, a metallic AFM (atomic force microscopy) tip is placed on the top of a silicon nitride membrane nanoelectromechanical resonator, acting as a movable top-gate of the coupled membrane resonator. Microwave interferometry is exploited to read out mechanical motions [3]. In this setup, all electrical signals pass through the tip and the membrane is simply connected to the ground.Based on this platform, we present 3-dimensional spatial maps of the several mechanical modes (see Figure 1 for the fundamental one) and mechanical damping rates by leveraging high resolutions of AFM setup. Besides, we also demonstrate mode coupling between the fundamental mode of the AFM tip (with resonance frequency ~ 15 kHz) and the fundamental mode of the silicon nitride membrane (~ 8 MHz). It allows to manipulate electromechanically induced transparency and amplification of the input signals of both coupled modes through sideband pumping the membrane resonator [4]. This platform facilitates studies of nanoscale mechanical resonators (e.g. carbon nanotube mechanical resonators) and mechanical dissipations, and brings conveniences in manipulating vibration modes located at different positions in suspended structures. [1] Alexander Tselev, IEEE Microwave, (2020) 21(10) pp. 72‑86,[2] David Hälg, Thomas Gisler, Eric C. Langman, Shobhna Misra, Oded Zilberberg, Albert Schliesser, Christian L. Degen, and Alexander Eichler, Strong Parametric Coupling between Two Ultracoherent Membrane Modes, Phys. Rev. Lett. 128, 094301 – ... |
| Document Type: |
conference object |
| Language: |
English |
| Availability: |
https://hal.science/hal-04234474 |
| Accession Number: |
edsbas.9D2A8A31 |
| Database: |
BASE |