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DIY adapting SEM for low-voltage TEM imaging

Title: DIY adapting SEM for low-voltage TEM imaging
Authors: Zecca PA.; Protasoni M.; Reguzzoni M.; Raspanti M.
Contributors: Zecca, Pa.; Protasoni, M.; Reguzzoni, M.; Raspanti, M.
Publication Year: 2025
Collection: IRInSubria - Institutional Repository Insubria (Università degli Studi dell’Insubria)
Subject Terms: SEM vs. TEM; electron microscopy; image quality; low‐voltage imaging; noise analysi; sample sensitivity
Description: Electron microscopy is essential for examining materials and biological samples at microscopic levels, providing detailed insights. Achieving high-quality imaging is often challenged by the potential damage high-energy beams can cause to sensitive samples. This study compares scanning electron microscopy (SEM) and transmission electron microscopy (TEM) to evaluate image quality, noise levels, and the ability to preserve delicate specimens. We used a modified SEM system with a transmitted electrons conversion accessory, allowing it to operate like a TEM but at lower voltages, thereby reducing sample damage. Our analysis included quantitative assessments of noise levels and texture characteristics such as entropy, contrast, dissimilarity, homogeneity, energy, and correlation. This comprehensive evaluation directly compared traditional TEM and the adapted SEM system across various images. The results showed that TEM provided images with higher clarity and significantly lower noise levels, reinforcing its status as the preferred method for detailed studies. However, the modified SEM system also produced high-quality images at very low acceleration voltages, which is crucial for imaging samples sensitive to high-energy exposure. The texture metrics analysis highlighted the strengths and limitations of each method, with TEM images exhibiting lower entropy and higher homogeneity, indicating smoother and more uniform textures. This study emphasizes the importance of selecting the appropriate electron microscopy method based on research needs, such as sample sensitivity and required detail level. With its conversion accessory, the modified SEM system is a versatile and valuable tool, offering a practical alternative to TEM for various applications. This research enhances our understanding of the capabilities and limitations of SEM and TEM. It paves the way for further innovations in electron microscopy techniques, improving their applicability for studying sensitive materials. Research Highlights: Our study introduces a ...
Document Type: article in journal/newspaper
File Description: ELETTRONICO
Language: English
Relation: info:eu-repo/semantics/altIdentifier/pmid/39153006; info:eu-repo/semantics/altIdentifier/wos/WOS:001292800600001; volume:88; issue:1; firstpage:17; lastpage:25; numberofpages:9; journal:MICROSCOPY RESEARCH AND TECHNIQUE; https://hdl.handle.net/11383/2186774
DOI: 10.1002/jemt.24679
Availability: https://hdl.handle.net/11383/2186774; https://doi.org/10.1002/jemt.24679
Rights: info:eu-repo/semantics/openAccess
Accession Number: edsbas.9E8F052B
Database: BASE