Evaluation of BBr2+ and B++Br+ implants in silicon
| Title: | Evaluation of BBr2+ and B++Br+ implants in silicon |
|---|---|
| Authors: | Sharp, JA; Gwilliam, RM; Sealy, BJ; Jeynes, C; Hamilton, JJ; Kirkby, KJ |
| Publication Year: | 2005 |
| Collection: | University of Surrey, Guildford: Surrey Scholarship Online. |
| Document Type: | conference object |
| Language: | unknown |
| Relation: | http://epubs.surrey.ac.uk/831638/; Sharp, JA, Gwilliam, RM, Sealy, BJ, Jeynes, C, Hamilton, JJ and Kirkby, KJ (2005) Evaluation of BBr2+ and B++Br+ implants in silicon In: Symposium on Materials Science and Device Issues for Futrue Si-Based Technologies held at the 2005 EMRS Meeting, 2005-05-31 - 2005-06-03, Strasbourg, FRANCE. |
| DOI: | 10.1016/j.mseb.2005.08.065 |
| Availability: | https://doi.org/10.1016/j.mseb.2005.08.065 |
| Accession Number: | edsbas.A06A14BC |
| Database: | BASE |