Desorption studies of surface contaminants using ultrashort laserpulses
| Title: | Desorption studies of surface contaminants using ultrashort laserpulses |
|---|---|
| Authors: | Schütze, M.; Trappe, C.; Raff, M.; Hannot, R.; Kurz, H. |
| Source: | 1. Int. Sympos. on Ultraclean Process. on Silicon Surf. 1992 ; 1. Int. Sympos. on Ultraclean Process. on Silicon Surf. 1992 1. Int. Sympos. on Ultraclean Process. on Silicon Surf |
| Publication Year: | 1992 |
| Collection: | RWTH Aachen University: RWTH Publications |
| Subject Geographic: | DE |
| Document Type: | conference object |
| Language: | English |
| Availability: | https://publications.rwth-aachen.de/record/121718; https://publications.rwth-aachen.de/search?p=id:%22RWTH-CONV-192669%22 |
| Rights: | info:eu-repo/semantics/closedAccess |
| Accession Number: | edsbas.A1F3E895 |
| Database: | BASE |