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Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing

Title: Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing
Authors: Gokhale, Devashish; Cerrón-Calle, Gabriel A.; Kim-Fu, Mitchell L.; Flores, Kenneth; Román Santiago, Anaira; Tsai, Shao-Wei; Aga, Diana S.; Aich, Nirupam; Diallo, Mamadou S.; Doudrick, Kyle; Hanigan, David; Hernández Sánchez, Raúl; Howarter, John; Jiang, Jianbing “Jimmy”; Jones, Gerrad D.; Lee, Linda S.; Liu, Haizhou; Manz, Katherine E.; McKenzie, Erica R.; Padhye, Lokesh P.; Sankaran, R. Mohan; Shepard, Scott M.; Strathmann, Timothy J.; Venkatesan, Arjun K.; Wong, Michael S.; Leet, Robert; Speed, David; Field, Jennifer A.; Westerhoff, Paul; Su, Xiao
Contributors: Division of Chemical, Bioengineering, Environmental, and Transport Systems
Source: Environmental Science & Technology ; volume 60, issue 3, page 2259-2276 ; ISSN 0013-936X 1520-5851
Publisher Information: American Chemical Society (ACS)
Publication Year: 2026
Document Type: article in journal/newspaper
Language: English
DOI: 10.1021/acs.est.5c10109
Availability: https://doi.org/10.1021/acs.est.5c10109; https://pubs.acs.org/doi/pdf/10.1021/acs.est.5c10109
Rights: https://doi.org/10.15223/policy-029 ; https://doi.org/10.15223/policy-037 ; https://doi.org/10.15223/policy-045
Accession Number: edsbas.A3F1BF96
Database: BASE