| Title: |
Exploring backside contact formation on SmartSiC™ engineered substrates using nanosecond laser anneal |
| Authors: |
Gelineau, Guillaume; Opprecht, Mathieu; Troutot, Nicolas; Das, Dhruba; Kerdiles, Sébastien; Huet, Stéphanie; Widiez, Julie |
| Contributors: |
Département Composants Silicium (DCOS); Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI); Direction de Recherche Technologique (CEA) (DRT (CEA)); Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)); Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA) |
| Source: |
ICSCRM 25 - The 22ND International Conference on Silicon Carbide and Related Materials ; https://cea.hal.science/cea-05533760 ; ICSCRM 25 - The 22ND International Conference on Silicon Carbide and Related Materials, Sep 2025, Busan, South Korea. , 2025 ; http://icscrm2025.org/ |
| Publisher Information: |
CCSD |
| Publication Year: |
2025 |
| Collection: |
HAL-CEA (Commissariat à l'énergie atomique et aux énergies alternatives) |
| Subject Terms: |
[CHIM.MATE]Chemical Sciences/Material chemistry |
| Subject Geographic: |
Busan; South Korea |
| Description: |
International audience |
| Document Type: |
conference object; still image |
| Language: |
English |
| Availability: |
https://cea.hal.science/cea-05533760; https://cea.hal.science/cea-05533760v1/document; https://cea.hal.science/cea-05533760v1/file/ICSCRM%202025_GGe_LaserAnnealPolySiC_v4.pdf |
| Rights: |
https://about.hal.science/hal-authorisation-v1/ ; info:eu-repo/semantics/OpenAccess |
| Accession Number: |
edsbas.B011F58B |
| Database: |
BASE |