| Title: |
Microstructuring system SiO 2 /Si with nanosecond pulsed fiber laser |
| Authors: |
Skvortsov, A. M.; Veiko, V. P.; Huynh, C. T.; Khaletskiy, R. A. |
| Contributors: |
Veiko, Vadim P.; Vartanyan, Tigran A. |
| Source: |
SPIE Proceedings ; Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013 ; volume 9065, page 90650S ; ISSN 0277-786X |
| Publisher Information: |
SPIE |
| Publication Year: |
2013 |
| Document Type: |
conference object |
| Language: |
unknown |
| DOI: |
10.1117/12.2053266 |
| Availability: |
https://doi.org/10.1117/12.2053266 |
| Accession Number: |
edsbas.B22AA510 |
| Database: |
BASE |