| Title: |
New generation of the miniature bimorph mirrors for compensation of the wavefront distortions |
| Authors: |
Toporovsky, Vladimir; Kudryashov, Alexis V.; Samarkin, Vadim; Sheldakova, Julia; Rukosuev, Alexey; Skvortsov, Arkadiy; Pshonkin, Danila |
| Contributors: |
Piyawattanametha, Wibool; Park, Yong-Hwa; Zappe, Hans |
| Source: |
MOEMS and Miniaturized Systems XVIII ; page 24 |
| Publisher Information: |
SPIE |
| Publication Year: |
2019 |
| Document Type: |
conference object |
| Language: |
unknown |
| DOI: |
10.1117/12.2510104 |
| Availability: |
https://doi.org/10.1117/12.2510104 |
| Accession Number: |
edsbas.BFC0457E |
| Database: |
BASE |