| Title: |
200 mm Wafer-Scale Integration of Bilayer Wurtzite Ferroelectric AlScN Exhibiting Effective d 33,f > 26.8 pm/V and e 31,f > 4.6 C/m 2 |
| Authors: |
Nayak, Sanjay; Picco, Andrea; Piot, Adrien; Ali, Washim Reza; Nallagatla, Venkata Raveendra; Bisht, Ravindra Singh; Solonenko, Dmytro; Henzen, Demian; Lazzari, Carla Maria; Serafini, Andrea; Codegoni, Davide; Balsamo, Amalia; Scaldaferri, Rossana; Allahyari, Elaheh; Ghosh, Anirban; Kratzer, Martin; Costantini, Sonia; Rusconi, Andrea; Pastina, Annalisa De; Moridi, Mohssen; Campanella, Humberto; Deluca, Marco |
| Publisher Information: |
Institute of Electrical and Electronics Engineers (IEEE) |
| Publication Year: |
2025 |
| Document Type: |
other/unknown material |
| Language: |
unknown |
| DOI: |
10.36227/techrxiv.176523413.35777009/v1 |
| Availability: |
https://doi.org/10.36227/techrxiv.176523413.35777009/v1 |
| Rights: |
https://creativecommons.org/licenses/by/4.0/ |
| Accession Number: |
edsbas.BFE8FF24 |
| Database: |
BASE |