| Title: |
Design space analysis of novel interconnect constructs for 22nm FDX technology |
| Authors: |
Guha Neogi, Tuhin; Jain, Navneet; Verma, Piyush; Permana, David; Lutich, Andrey; Weishbuch, Francois; Wehella-Gamage, Deepal; Ramadout, Benoit Francois Claude; Vangara, Gowtham; Kim, Juhan; Herrmann, Thomas; Sun, Kai; Babich, Katherina; Pritchard, David; Rashed, Mahbub |
| Contributors: |
Capodieci, Luigi; Cain, Jason P. |
| Source: |
SPIE Proceedings ; Design-Process-Technology Co-optimization for Manufacturability XI ; volume 10148, page 101480Z ; ISSN 0277-786X |
| Publisher Information: |
SPIE |
| Publication Year: |
2017 |
| Document Type: |
conference object |
| Language: |
unknown |
| DOI: |
10.1117/12.2258668 |
| Availability: |
https://doi.org/10.1117/12.2258668 |
| Accession Number: |
edsbas.C85206C1 |
| Database: |
BASE |