Recent progress on alternative metals for advanced interconnects
| Title: | Recent progress on alternative metals for advanced interconnects |
|---|---|
| Authors: | Lee, Sang Woon; Sung, Ju Young; Lee, Chae Hyun; Lim, Yebin; Oh, In Su; Lee, Sang Hyuk; Choi, Kyeong Hyeon |
| Source: | Journal of Materials Chemistry C ; ISSN 2050-7526 2050-7534 |
| Publisher Information: | Royal Society of Chemistry (RSC) |
| Publication Year: | 2026 |
| Description: | With the continued downscaling of semiconductor devices such as transistors and memory, metal interconnects have become increasingly critical for transmitting the electrical signals required for data processing. Recently, metal interconnects... |
| Document Type: | article in journal/newspaper |
| Language: | English |
| DOI: | 10.1039/d6tc00317f |
| Availability: | https://doi.org/10.1039/d6tc00317f; http://pubs.rsc.org/en/content/articlepdf/2026/TC/D6TC00317F |
| Rights: | http://creativecommons.org/licenses/by-nc/3.0/ |
| Accession Number: | edsbas.CCB18CCF |
| Database: | BASE |