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Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring

Title:	Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring
Authors:	Krohs, F.; Luttermann, T.; Stolle, C.; Fatikow, S.; Brousseau, Emmanuel Bruno Jean Paul; Dimov, Stefan Simeonov
Contributors:	Menz, Wolfgang; Dimov, Stefan Simeonov
Publisher Information:	Whittles
Publication Year:	2008
Collection:	Cardiff University: ORCA (Online Research @ Cardiff)
Document Type:	conference object
Language:	unknown
Relation:	Krohs, F., Luttermann, T., Stolle, C., Fatikow, S., Brousseau, Emmanuel Bruno Jean Paul https://orca.cardiff.ac.uk/view/cardiffauthors/A003433S.html orcid:0000-0003-2728-3189 orcid:0000-0003-2728-3189 and Dimov, Stefan Simeonov 2008. Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring. Presented at: International Conference on Multi-Material Micro Manufacture, Cardiff, UK, 9-11 September 2008. Published in: Menz, Wolfgang and Dimov, Stefan Simeonov eds. 4M 2008: Fourth International Conference on Multi-Material Micro Manufacture, 9th-11th September 2008, Cardiff, Wales. Dunbeath: Whittles, pp. 118-123.
Availability:	https://orca.cardiff.ac.uk/id/eprint/21021/
Accession Number:	edsbas.D237224B
Database:	BASE