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Non-planar growth of high Al-mole-fraction AlGaN heterostructures on patterned GaN substrates for ultraviolet laser diodes

Title: Non-planar growth of high Al-mole-fraction AlGaN heterostructures on patterned GaN substrates for ultraviolet laser diodes
Authors: Ando, Yuto; Xu, Zhiyu; Detchprohm, Theeradetch; Young, Preston; Dupuis, Russell D.
Contributors: National Science Foundation
Source: Applied Physics Letters ; volume 123, issue 13 ; ISSN 0003-6951 1077-3118
Publisher Information: AIP Publishing
Publication Year: 2023
Description: The non-planar growth of UV-A laser diode heterostructures composed of AlGaN layers with high Al-mole-fractions and thicknesses exceeding the critical layer thickness was performed on patterned c-plane GaN (0001) substrates with stripe-shaped mesa structures. This approach suppressed the surface cracking at the top of the mesas via an anisotropic relaxation of the in-plane strain along the direction normal to the mesa stripes. Stimulated emission and laser operation at room temperature with emission in the UV-A range under pulsed current injection were demonstrated for laser diodes fabricated on the mesas.
Document Type: article in journal/newspaper
Language: English
DOI: 10.1063/5.0159684
DOI: 10.1063/5.0159684/18137694/132103_1_5.0159684.pdf
Availability: https://doi.org/10.1063/5.0159684; https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0159684/18137694/132103_1_5.0159684.pdf
Accession Number: edsbas.D3C39D8C
Database: BASE