Comparison of elemental boron and boron halide implants into silicon
| Title: | Comparison of elemental boron and boron halide implants into silicon |
|---|---|
| Authors: | Sharp, JA; Gwilliam, RM; Sealy, BJ; Jeynes, C; Hamilton, JJ; Kirkby, KJ |
| Publication Year: | 2005 |
| Collection: | University of Surrey, Guildford: Surrey Scholarship Online. |
| Document Type: | conference object |
| Language: | unknown |
| Relation: | http://epubs.surrey.ac.uk/831639/; Sharp, JA, Gwilliam, RM, Sealy, BJ, Jeynes, C, Hamilton, JJ and Kirkby, KJ (2005) Comparison of elemental boron and boron halide implants into silicon In: 15th International Conference on Ion Implantation Technology, 2004-10-25 - 2004-10-27, Taipei, TAIWAN. |
| DOI: | 10.1016/j.nimb.2005.04.084 |
| Availability: | https://doi.org/10.1016/j.nimb.2005.04.084 |
| Accession Number: | edsbas.D76D242A |
| Database: | BASE |