| Title: |
Piezoresistance characterization of silicon nanowires in uniaxial and isostatic pressure variation |
| Authors: |
Aghabalaei Fakhri, Elham; Plugaru, Rodica; Sultan, Muhammad Taha; Kristinsson, Thorsteinn; Árnason, Hákon Örn; Plugaru, Neculai; Manolescu, Andrei; Ingvarsson, Snorri; Svavarsson, Halldor |
| Contributors: |
Department of Engineering (RU); Verkfræðideild (HR); School of Technology (RU); Tæknisvið (HR); Science Institute (UI); Raunvísindastofnun (HÍ); Reykjavik University; Háskólinn í Reykjavík; University of Iceland; Háskóli Íslands |
| Publisher Information: |
MDPI AG |
| Publication Year: |
2022 |
| Collection: |
Opin vísindi (Iceland) |
| Subject Terms: |
Electrical and Electronic Engineering; Biochemistry; Instrumentation; Atomic and Molecular Physics; Optics; Analytical Chemistry; Silicon nanowires; MACE; Piezoresistivity; Rafmagnsverkfræði; Rafeindaverkfræði; Lífefnafræði; Tækjafræði; Atómfræði; Sameindafræði; Ljósfræði; Efnafræði; Nanótækni; Kísill |
| Description: |
Publisher's version (útgefin grein) ; Silicon nanowires (SiNWs) are known to exhibit a large piezoresistance (PZR) effect, making them suitable for various sensing applications. Here, we report the results of a PZR investigation on randomly distributed and interconnected vertical silicon nanowire arrays as a pressure sensor. The samples were produced from p-type (100) Si wafers using a silver catalyzed top-down etching process. The piezoresistance response of these SiNW arrays was analyzed by measuring their I-V characteristics under applied uniaxial as well as isostatic pressure. The interconnected SiNWs exhibit increased mechanical stability in comparison with separated or periodic nanowires. The repeatability of the fabrication process and statistical distribution of measurements were also tested on several samples from different batches. A sensing resolution down to roughly 1 mbar pressure was observed with uniaxial force application, and more than two orders of magnitude resistance variation were determined for isostatic pressure below atmospheric pressure. ; Reykjavík University ; Peer reviewed |
| Document Type: |
article in journal/newspaper |
| Language: |
English |
| Relation: |
Reykjavik University Ph.D. fund no. 220006; Sensors;22(17); https://www.mdpi.com/1424-8220/22/17/6340/pdf; Fakhri, E.; Plugaru, R.; Sultan, M.T.; Hanning Kristinsson, T.; Örn Árnason, H.; Plugaru, N.; Manolescu, A.; Ingvarsson, S.; Svavarsson, H.G. Piezoresistance Characterization of Silicon Nanowires in Uniaxial and Isostatic Pressure Variation. Sensors 2022, 22, 6340. https://doi.org/10.3390/ s22176340; https://hdl.handle.net/20.500.11815/4023 |
| DOI: |
10.3390/s22176340 |
| Availability: |
https://hdl.handle.net/20.500.11815/4023; https://doi.org/10.3390/s22176340 |
| Rights: |
info:eu-repo/semantics/openAccess |
| Accession Number: |
edsbas.D8FEC297 |
| Database: |
BASE |