Mechanical–Electrical Measurements and Relevant Test Structures for Sensing Interconnect Stress Effects in CMOS Technology
| Title: | Mechanical–Electrical Measurements and Relevant Test Structures for Sensing Interconnect Stress Effects in CMOS Technology |
|---|---|
| Authors: | Blayac, Sylvain; Rivero, Christian; Fornara, Pascal; Lopez, Laurent; Demange, Nicolas |
| Source: | IEEE Transactions on Semiconductor Manufacturing ; volume 25, issue 4, page 564-570 ; ISSN 0894-6507 1558-2345 |
| Publisher Information: | Institute of Electrical and Electronics Engineers (IEEE) |
| Publication Year: | 2012 |
| Document Type: | article in journal/newspaper |
| Language: | unknown |
| DOI: | 10.1109/tsm.2012.2198500 |
| Availability: | https://doi.org/10.1109/tsm.2012.2198500; http://xplorestaging.ieee.org/ielx5/66/6329540/06197744.pdf?arnumber=6197744 |
| Accession Number: | edsbas.DFC03341 |
| Database: | BASE |