| Title: |
Development of Micro/Nano Pattern Arrays with Grating-Based Periodic Structures using the Direct Laser Lithography System |
| Authors: |
Rajan, Rency; Kirubaraj, Alfred; Samson, Senith; Prince, Shajin; Ramson, S.R. Jino |
| Source: |
Current Nanoscience ; volume 21, issue 1, page 167-177 ; ISSN 1573-4137 |
| Publisher Information: |
Bentham Science Publishers Ltd. |
| Publication Year: |
2025 |
| Description: |
Introduction: This research delves into utilizing the Direct Laser Lithography System to produce micro/nanopattern arrays with grating-based periodic structures. Initially, refining the variation in periodic structures within these arrays becomes a pivotal pursuit. This demands a deep comprehension of how structural variation aligns with specific applications, particularly in photonics and material science. Methods: Advancements in hardware, software, or process optimization techniques hold potential for reaching this objective. Using an optical beam, this system enables the engraving of moderate periodic and quasi-periodic structures, enhancing pattern formation in a three-dimensional environment. Through cost-effective direct-beam interferometry systems utilizing 405 nm GaN and 290 to 780 nm AlInGaN semiconductor laser diodes, patterns ranging from in period were created, employing 300 nm gratings. Results: The system's cost-efficiency and ability to achieve high-resolution permit the creation of both regular and irregular grating designs. By employing an optical head assembly from a bluray disc recorder, housing a semiconductor laser diode and an objective lens with an NA of 0.85, this system displays promising potential in progressing the fabrication of micro/nanopattern arrays. Conclusion: Assessing their optical, mechanical, and electrical properties and exploring potential applications across varied fields like optoelectronics, photovoltaics, sensors, and biomedical devices represent critical strides for further exploration and advancement. |
| Document Type: |
article in journal/newspaper |
| Language: |
English |
| DOI: |
10.2174/0115734137283785240118095556 |
| Availability: |
https://doi.org/10.2174/0115734137283785240118095556; https://www.eurekaselect.com/article/download?doi=10.2174/0115734137283785240118095556; https://www.eurekaselect.com/229718/article |
| Accession Number: |
edsbas.E01BF9F |
| Database: |
BASE |