A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing ; Metal and organic contamination in Si device processing
| Title: | A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing ; Metal and organic contamination in Si device processing |
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| Authors: | Polignano, M. L.; Codegoni, D.; Grasso, S.; Mica, I.; Borionetti, G.; Nutsch, A. |
| Source: | physica status solidi (a) ; volume 212, issue 3, page 495-505 ; ISSN 1862-6300 |
| Publisher Information: | Wiley |
| Publication Year: | 2015 |
| Collection: | Wiley Online Library (Open Access Articles via Crossref) |
| Document Type: | article in journal/newspaper |
| Language: | English |
| DOI: | 10.1002/pssa.201400082 |
| DOI: | 10.1002/pssa.201400082/fullpdf |
| Availability: | https://doi.org/10.1002/pssa.201400082; https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fpssa.201400082; http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201400082/fullpdf |
| Rights: | http://doi.wiley.com/10.1002/tdm_license_1.1 ; http://onlinelibrary.wiley.com/termsAndConditions#vor |
| Accession Number: | edsbas.FBB7382E |
| Database: | BASE |