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CMOS-MEMS Gas Sensor Dubbed GMOS for SelectiveAnalysis of Gases with Tiny Edge Machine Learning

Title: CMOS-MEMS Gas Sensor Dubbed GMOS for SelectiveAnalysis of Gases with Tiny Edge Machine Learning
Authors: Adir Krayden; Maayan Schohet; Oz Shmueli; Dima Shlenkevitch; Tanya Blank; Sara Stolyarova; Yael Nemirovsky
Source: Engineering Proceedings, Vol 27, Iss 1, p 81 (2022)
Publisher Information: MDPI AG, 2022.
Publication Year: 2022
Subject Terms: TinyML; MEMS; gas sensor; SOI; MOS; data analytics; Engineering machinery, tools, and implements; TA213-215
Description: Embedded machine learning, TinyML, is a relatively new and fast-growing field of ML, enabling on-device sensor data analytics at low power requirements. This paper presents possible improvements to GMOS, a gas sensor, using TinyML technology. GMOS is a low-cost catalytic gas sensor, fabricated with the standard CMOS-SOI process, based on a suspended thermal transistor MOS (TMOS). Exothermic combustion reactions lead to temperature increases, which modify the suspended transistor’s (used as the sensing element) current-voltage characteristics. We were able to use GMOS measurements for gas classification (both for gas types, as well as concentration), resulting in high-proficiency gas detection at a low cost. Our preliminary results show great successes in the detection of ethanol and acetone gases. Moreover, we believe the method could be generalized to more gas types, concentrations, and gas mixes in future research.
Document Type: article
File Description: electronic resource
Language: English
ISSN: 2673-4591
Relation: https://www.mdpi.com/2673-4591/27/1/81; https://doaj.org/toc/2673-4591
DOI: 10.3390/ecsa-9-13316
Access URL: https://doaj.org/article/ff43de2c48a34ceebb4ca5ff6cfd686a
Accession Number: edsdoj.ff43de2c48a34ceebb4ca5ff6cfd686a
Database: Directory of Open Access Journals