| Title: |
Ultra-Low-Power Logic with Contactless Capacitive MEMS |
| Authors: |
Markovic, Aleksandra; Mazenq, Laurent; Laborde, Adrian; Fanet, Herve; Pillonnet, Gael; Legrand, Bernard |
| Source: |
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 2022 21st International Conference on. :223-227 Dec, 2022 |
| Relation: |
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) |
| Database: |
IEEE Xplore Digital Library |