| Title: |
Low thermal budget PBTI and NBTI reliability solutions for multi-Vth CMOS RMG stacks based on atomic oxygen and hydrogen treatments |
| Authors: |
Franco, J.; Arimura, H.; De Marneffe, J.-F.; Claes, D.; Brus, S.; Vandooren, A.; Litta, E. Dentoni; Horiguchi, N.; Croes, K.; Kaczer, B. |
| Source: |
2022 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2022 International. :30.4.1-30.4.4 Dec, 2022 |
| Relation: |
2022 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |